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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
1998, vol.4, no.2
1998, vol.4, no.3
1998, vol.4, no.4
1998, vol.5, no.1
1998, vol.5, no.2
题名
作者
出版年
年卷期
Three electrodes touch-mode capacitive pressure sensor
K-M. Chang; G-J. Hwang; Y-L. Hsien
1998
1998, vol.5, no.2
Reliability implications of using LIGA components in communication networks
R. Johnson; I. Cook; R. Grigsby
1998
1998, vol.5, no.2
Recent advances in conductive adhesives for direct chip attach applications
J. Liu
1998
1998, vol.5, no.2
Progress in magnetic microactuators
H. Guckel
1998
1998, vol.5, no.2
Influence of gold thin-film interlayers on anodic bonding of copper microstructures produced by LIGA
A. Gerlach; D. Maas; D. Seidel
1998
1998, vol.5, no.2
Fabrication of micro-parts by high aspect ratio structuring and metal injection molding using the supercritical debinding method
T. Shimizu; Y. Murakoshi; T. Sano; R. Maeda; S. Sugiyama
1998
1998, vol.5, no.2
Developing new markets for high aspect ratio micro-machined devices
J. Skardon; M. Vandenberg
1998
1998, vol.5, no.2
Applications of full-field optical methods in micro-mechanics and material engineering
M. Kujawinska
1998
1998, vol.5, no.2
An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives
S. Nakamura; K. Suzuki; M. Ataka; H. Fujita; S. Basrour; V. Soumann; M. Labachelerie; W. Daniau
1998
1998, vol.5, no.2
Transducer and protective PVD-films for applications in microsystem components
E. Quandt; H. Holleck
1998
1998, vol.5, no.1
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