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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1999, vol.5, no.3 1999, vol.5, no.4 1999, vol.6, no.1 1999, vol.6, no.2

题名作者出版年年卷期
Analytical modeling and optimization for a laterally-driven polysilicon thermal actuatorQ. -A. Huang; N. K. S. Lee19991999, vol.5, no.3
Fabrication of nanomechanical optical devices with aligned wafer bondingC. Gui; G. J. Veldhuis; T. M. Koster; P. V. Lambeck; J. W. Berenschot; J. G. E. Gardeniers; M. Elwenspoek19991999, vol.5, no.3
High-speed visualization, a powerful diagnostic tool for microactuators- retrospect and prospectP. Krehl; S. Engemann; C. Rembe; E. P. Hofer19991999, vol.5, no.3
Low-temperature anodic bonding of silicon to silicon wafers by means of intermediate glass layersA. Gerlach; D. Maas; D. Seidel; H. Bartuch; S. Schundau; K. Kaschlik19991999, vol.5, no.3
Materials of LIGA technologyW. Ehrfeld; V. Hessel; H. Lowe; Ch. Schulz; L. Weber19991999, vol.5, no.3



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