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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

1999, vol.5, no.3 1999, vol.5, no.4 1999, vol.6, no.1 1999, vol.6, no.2

题名作者出版年年卷期
A study of the effect of the fabrication process on diffusion in a layered thin filmT. Hirasawa; H. Kotera; T. Yamamoto; S. Shima19991999, vol.5, no.4
Applications and simulation of unconventional bulk-micromachining using underetching of (100) silicon planesG. Schropfer; M. de Labachelerie; C. R. Tellier19991999, vol.5, no.4
Control tribological and mechanical properties of MEMS surfaces Part 1: critical reviewZ. Rymuza19991999, vol.5, no.4
Control tribological and mechanical properties of MEMS surfaces. part 2: nanomechanical behavior of self-lubricating ultrathin filmsZ. Rymuza; M. Misiak; L. Kuhn; K. Schmidt-Szalowski; Z. Rzanek-Boroch19991999, vol.5, no.4
Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanismsD. Kamiya; T. Hayama; M. Horie19991999, vol.5, no.4
Finite element investigation into proposed bearing mechanism for a fluid driven micro actuatorR. S. Dhariwal; S. M. Flockhart19991999, vol.5, no.4
Inexpensive, quickly producable X-ray mask for LIGAC. Harris; Y. Desta; K. W. Kelly; G. Calderon19991999, vol.5, no.4
Manufacture of diffraction grating on tiny parts by means of ultraprecision millingK. Sawada; S. Odaka; T. Kawai; T. Hirai; Y. Takeuchi; T. Sata19991999, vol.5, no.4
Multilayer polyimide film substrates for interconnections in microsystemsA. Fach; Y. Athanassov; U. Brunner; D. Hablutzel; B. Ketterer; J. Link19991999, vol.5, no.4
Role of the film texturing on the response of particle detectors based on CVD diamondG. Faggio; G. Messina; S. Santangelo; G. V. Rinati19991999, vol.5, no.4



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