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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2002, vol.8, no.1 2002, vol.8, no.2-3 2002, vol.8, no.4-5 2002, vol.8, no.6 2002, vol.9, no.1-2

题名作者出版年年卷期
Two-dimensional metallic photonic band-gap crystals fabricated by LIGAN. Katsarakis; M. Bender; L. Singleton; G. Kiriakidis; C. M. Soukoulis20022002, vol.8, no.2-3
Microscreen-based replication of electroforming micromoldsL. A. Domeier; M. Gonzales; J. Hachman; J. M. Hruby; R. Janek; A. M. Morales20022002, vol.8, no.2-3
Micromolded easy-assembly multi fiber connector: RibConU. Wallrabe; H. Dittrich; G. Friedsam; Th. Hanemann; J. Mohr; K. Muller; V. Piotter; P. Ruther; Th. Schaller; W. Zissler20022002, vol.8, no.2-3
Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA processA. Schneider; B. Su; T. W. Button; L. Singleton; O. Wilhelmi; S. E. Huq; P. D. Prewett; R. A. Lawes20022002, vol.8, no.2-3
Moving mask deep X-ray lithography system with multi stage for 3-D microfabricationO. Tabata; H. You; N. Matsuzuka; T. Yamaji; S. Uemura; I. Dama20022002, vol.8, no.2-3
Deep lithography with a low energy synchrontron source: fabrication of X-ray refractive single lensesY. Zhang; T. Katoh; D. Amano20022002, vol.8, no.2-3
Exposure of photosensitive glasses with pulsed UV-laser radiationU. Brokmann; M. Jacquorie; M. Talkenberg; A. Harnisch; E. W. Kreutz; D. Hulsenberg; R. Poprawe20022002, vol.8, no.2-3
Production of metallic high aspect ratio microstructures by microcastingG. Baumeister; K. Mueller; R. Ruprecht; J. Hausselt20022002, vol.8, no.2-3
Quasi-static and cyclic testing of specimens with high aspect ratios produced by micro-casting and micro-powder-injection-mouldingM. Auhorn; T. Beck; V. Schulze; D. Lohe20022002, vol.8, no.2-3
Electrical bottom side contacting of electromechanical LIGA-structures by vias and screen printingA. Ruzzu; O. Fromhein; D. Haller20022002, vol.8, no.2-3
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