哈尔滨工业大学邓宗全院士团队
      文献服务与管理平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2004, vol.10, no.10 2004, vol.10, no.2 2004, vol.10, no.3 2004, vol.10, no.4 2004, vol.10, no.5 2004, vol.10, no.6-7
2004, vol.10, no.8-9

题名作者出版年年卷期
Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chipS. Chung; J. Park; C. Chung; D. C. Han; J. K. Chang20042004, vol.10, no.2
Characterization and failure analysis of MEMS: high-resolution optical investigation of small out-of-plane movements and fast vibrationsW. Merlijn van Spengen; R. Puers; R. Mertens; Ingrid De Wolf20042004, vol.10, no.2
Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVDC. Chang; T. Abe; M. Esashi20042004, vol.10, no.2
Effect of disk rotational speed on contamination particles generated in a hard disk driveD. Y. Lee; J. Hwang; G. N. Bae20042004, vol.10, no.2
Tribocharge build-up and decay at a slider-disk interfaceH. S. Park; J. Hwang; S. H. Choa20042004, vol.10, no.2
Dynamics simulation of MEMS device embedded hard disk drive systemsJ. P. Yang; J. Chai; Y. Lu20042004, vol.10, no.2
A novel design and microfabrication for a micro PEMFCS. -S. Hsieh; J. -K. Kuo; C. -F. Hwang; H. -H. Tsai20042004, vol.10, no.2
Flexible tooling for localized electrochemical deposition with wire-electrodischarge grindingJ. H. Choo; S. H. Yeo; F. F. Tan20042004, vol.10, no.2
Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuatorsT. Cui; D. Markus; S. Zurn; D. L Polla20042004, vol.10, no.2
Design and fabrication of high sensitive microphone diaphragm using deep corrugation techniqueW. J. Wang; R. M. Lin; Y. Ren20042004, vol.10, no.2
12



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024