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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2004, vol.10, no.10 2004, vol.10, no.2 2004, vol.10, no.3 2004, vol.10, no.4 2004, vol.10, no.5 2004, vol.10, no.6-7
2004, vol.10, no.8-9

题名作者出版年年卷期
"Plug-up"-a new concept for fabricating SOI MEMS devicesJ. Kiihamaki; J. Dekker; P. Pekko; H. Kattelus; T. Sillanpaa; T. Mattila20042004, vol.10, no.5
New electroforming technology pressure aid for LIGA processT.-H. Tsai; H. Yang; R. Chein20042004, vol.10, no.5
SU8 resist plasma etching and its optimisationG. Hong; A. S. Holmes; M. E. Heaton20042004, vol.10, no.5
Thin film formation on non-planar surface with use of spray coating fabricationM. Ichiki; L. Zhang; Z. Yang; T. Ikehara; R. Maeda20042004, vol.10, no.5
Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow processC. Rusu; H. Jansen; R. Gunn; A. Witvrouw20042004, vol.10, no.5
Bonding of polymer microstructures by UV irradiation and subsequent welding at low temperaturesR. Truckenmuller; P. Henzi; D. Herrmann; V. Saile; W. K. Schomburg20042004, vol.10, no.5
Modular parametric finite element modelling for reliability-studies in electronic and mems packagingB. Wunderle; J. Auersperg; V. Grosser; E. Kaulfersch; O. Wittier; B. Michel20042004, vol.10, no.5
Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cellL. Fonseca; E. Cabruja; C. Calaza; R. Rubio; J. Santander; E. Figueras; I. Gracia; C. Cane; M. Moreno; S. Marco20042004, vol.10, no.5
Dynamic modeling of interactions between fields and matter in MEMS devicesK. Zeng; Z. Liu; J. G. Korvink20042004, vol.10, no.5
Parallel-beams/lever electrothermal out-of-plane actuatorS. Deladi; G. Krijnen; M. C. Elwenspoek20042004, vol.10, no.5
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