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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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2005, vol.11, no.1 2005, vol.11, no.11 2005, vol.11, no.12 2005, vol.11, no.2-3 2005, vol.11, no.4-5 2005, vol.11, no.6
2005, vol.11, no.7 2005, vol.11, no.8-10 2005, vol.12, no.1-2

题名作者出版年年卷期
Friction stir microforming of superplastic alloysS. Mohan; R. S. Mishra20052005, vol.11, no.4-5
3D microstructure fabrication for a high luminosity lighting-panel for LCD using synchrotron radiationM. Minamitani; Y. Utsumi; T. Hattori20052005, vol.11, no.4-5
Improvement of capillary electrophoresis property for microchannels fabricated by deep X-ray lithographyY. Utsumi; M. Ozaki; S. Terabe; T. Hattori20052005, vol.11, no.4-5
MODULIGA: The LIGA process as a modular production method-current standardization status in GermanyL. Hahn; P. Meyer; K. Bade; H. Hejn; J. Schulz; B. Lochel; H. U. Scheunemann; D. Schondelmaier; L. Singleton20052005, vol.11, no.4-5
Micro-ECM for production of microsystems with a high aspect ratioR. Forster; A. Schoth; W. Menz20052005, vol.11, no.4-5
Micro wire EDM for high aspect ratio 3D microstructuring of ceramics and metalsA. Schoth; R. Forster; W. Menz20052005, vol.11, no.4-5
Knowledge-based design environment for primary shaped micro partsA. Albers; N. Burkardt; S. Mauser; J. Marz20052005, vol.11, no.4-5
The lifetime comparison of Ni and Ni-PTFE moulding inserts with high aspect-ratio structureY. Tian; P. Zhang; G. Liu; X. Tian20052005, vol.11, no.4-5
Simulation of deep UV lithography with SU-8 resist by using 365 nm light sourceX. Tian; G. Liu; Y. Tian; P. Zhang; X. Zhang20052005, vol.11, no.4-5
Fabrication of ceramic microcomponents using deep X-ray lithographyC. Muller; T. Hanemann; G. Wiche; C. Kumar; J. Goettert20052005, vol.11, no.4-5
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