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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
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2009, vol.15, no.1
2009, vol.15, no.10/11
2009, vol.15, no.12
2009, vol.15, no.2
2009, vol.15, no.3
2009, vol.15, no.4
2009, vol.15, no.5
2009, vol.15, no.6
2009, vol.15, no.7
2009, vol.15, no.8
2009, vol.15, no.9
题名
作者
出版年
年卷期
Analysis of pattern height development in hot embossing process
Yong He; Jian-Zhong Fu; Zi-Chen Chen
2009
2009, vol.15, no.7
MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils
Chong Lei; Ren Wang; Yong Zhou; Zhimin Zhou
2009
2009, vol.15, no.7
Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme
In-Hyouk Song; Yves-Alain Peter; Michel Meunier
2009
2009, vol.15, no.7
Single-wafer die-level fusion bonding process for multi-layer devices
Haifeng Dong
2009
2009, vol.15, no.7
A nodal analysis method for electromechanical behavior simulation of bow-tie shaped microbeams
Min Li; Qing-An Huang; Wei-Hua Li
2009
2009, vol.15, no.7
A study of PZT valveless micropump with asymmetric obstacles
Ching-Jiun Lee; Horn-Jiunn Sheen; Zhi-Kai Tu; U. Lei; Cheng-Ying Yang
2009
2009, vol.15, no.7
A miniature spindle motor with fluid dynamic bearings for portable storage device applications
Chien-Sheng Liu; Psang-Dain Lin; Meng-Che Tsai
2009
2009, vol.15, no.7
Design of a relaying electroosmosis pump driven by low-voltage DC
Qiuquan Guo; Yu Liu; Xueyin Wu; Jun Yang
2009
2009, vol.15, no.7
A novel active vibration isolator applied for micro-gyro by array of deposited electrodes
Nan-Chyuan Tsai; Chung-Yang Sue; Bing-Hong Liou
2009
2009, vol.15, no.7
Fabrication and characterization of a polymethyl methacrylate continuous-flow PCR microfluidic chip using CO{sub}2 laser ablation
Heng Qi; Xiansong Wang; Tao Chen; Xuemei Ma; Tiechuan Zuo
2009
2009, vol.15, no.7
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