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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2012, vol.18, no.1 2012, vol.18, no.11 2012, vol.18, no.12 2012, vol.18, no.2 2012, vol.18, no.3 2012, vol.18, no.4
2012, vol.18, no.5 2012, vol.18, no.6 2012, vol.18, no.7/8 2012, vol.18, no.9/10

题名作者出版年年卷期
Laser micro-welding of aluminum and copper with and without tin foil alloyMohammad M. Hailat; Ahsan Mian; Zariff A. Chaudhury; Golam Newaz; Rahul Patwa; Hans J. Herfurth20122012, vol.18, no.1
Study of residual stress-induced deformation of multilayer cantilever for maskless microplasma etchingLi Wen; Zhen Yuan; Leili Cheng; Hongjiang Zeng; Jiaru Chu20122012, vol.18, no.1
Wafer-level multilayer integration of RF passives with thick BCB/metal interlayer connection in silicon-based SiPJiajie Tang; Xiaoyun Ding; Fei Geng; Xiaowei Sun; Le Luo20122012, vol.18, no.1
The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicleKun Meng; Weiping Zhang; Wenyuan Chen; Hongyi Li; Pengcheng Chi; Caijun Zou; Xiaosheng Wu; Feng Cui; Wu Liu; Jinge Chen20122012, vol.18, no.1
Device level studies of adaptive optics sliding components in microprojectorsJames Hunt; Bharat Bhushan20122012, vol.18, no.1
Bi_2Te_3-Sb_2Te_3 on polymeric substrate for X-ray detectors based on the seebeck effectJ. G. Rocha; L. M. Goncalves; S. Lanceros-Mendez20122012, vol.18, no.1
A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavityGuoqiang Wu; Dehui Xu; Bin Xiong; Yuelin Wang20122012, vol.18, no.1
Capacitive humidity sensors based on a newly designed interdigitated electrode structureJi-Hong Kim; Byung-Moo Moon; Sung-Min Hong20122012, vol.18, no.1
Hollow metallic microneedles fabricated by combining bulk silicon micromachining and UV-LIGA technologyXiao-Xiao Yan; Jing-Quan Liu; Xiu-Cheng Shen; Chun-Sheng Yang20122012, vol.18, no.1
Experimental study of the flow-structure interactions in an air- or helium-filled hard disk drive geometryS. W. Kil; J. A. C. Humphrey; H. Haj-Hariri20122012, vol.18, no.1
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