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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2012, vol.18, no.1 2012, vol.18, no.11 2012, vol.18, no.12 2012, vol.18, no.2 2012, vol.18, no.3 2012, vol.18, no.4
2012, vol.18, no.5 2012, vol.18, no.6 2012, vol.18, no.7/8 2012, vol.18, no.9/10

题名作者出版年年卷期
Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvestersAliza Aini Md Ralib; Anis Nurashikin Nordin; Hanim Salleh; Raihan Othman20122012, vol.18, no.11
An electromechanical model for a clamped-clamped beam type piezoelectric transformerChia-Che Wu; Chi-Shao Chen20122012, vol.18, no.11
Dynamic behavior of resonant piezoelectric cantilever as liquid level detection sensorM. Maroufi; M. Shamshirsaz20122012, vol.18, no.11
Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeakerIman Shahosseini; Elie Lefeuvre; Emile Martincic; Marion Woytasik; Johan Moulin; Souhil Megherbi; Romain Ravaud; Guy Lemarquand20122012, vol.18, no.11
Multiple-output MEMS DC/DC converter: a system modeling studyA. Chaehoi; M. Begbie; D. Weiland; Z. J. Chew; L. Li20122012, vol.18, no.11
Study of black silicon obtained by cryogenic plasma etching: approach to achieve the hot spot of a thermoelectric energy harvesterK. N. Nguyen; D. Abi-Saab; P. Basset; E. Richalot; M. Malak; N. Pavy; F. Flourens; F. Marty; D. Angelescu; Y. Leprince-Wang; T. Bourouina20122012, vol.18, no.11
Fabrication and characterization of a fused silica-based optical waveguide with femtosecond fiber laser pulsesJaw-Luen Tang; Chien-Hsing Chen; Ting-Chou Chang; Shau-Chun Wang; Lai-Kwan Chau; Wei-Te Wu20122012, vol.18, no.11
Interfacial configurations and mixing performances of fluids in staggered curved-channel micromixersJyh Jian Chen; Yi Shiang Shie20122012, vol.18, no.11
Fabrication methods for the manufacture of sapphire micropartsDavid M. Allen; Roxana Redondo; Maximilien Dany20122012, vol.18, no.11
Study of crescent shaped alignment marks applicable to self-alignment of micro-parts with and without positive and negative polesDong F. Wang; Shouhei Shiga; Takao Ishida; Ryutaro Maeda20122012, vol.18, no.11
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