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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2012, vol.18, no.1 2012, vol.18, no.11 2012, vol.18, no.12 2012, vol.18, no.2 2012, vol.18, no.3 2012, vol.18, no.4
2012, vol.18, no.5 2012, vol.18, no.6 2012, vol.18, no.7/8 2012, vol.18, no.9/10

题名作者出版年年卷期
Temperature compensation of micromachined silicon hot wire sensor using ANN techniqueM. Laghrouche; B. Idjeri; K. Hammouche; M. Tahanout; J. Boussey; S. Ameur20122012, vol.18, no.3
Mechanical and tribological characterization of a thermally actuated MEMS cantileverMarius Pustan; Veronique Rochus; Jean-Claude Golinval20122012, vol.18, no.3
Hot embossing at viscous state to enhance filling process for complex polymer structuresXuelin Zhu; Terrence W. Simon; Tianhong Cui20122012, vol.18, no.3
Flexible balloon actuators for active flow controlHaifeng Lv; Chengyu Jiang; Hui Hou; Zhou Zhou; Jinjun Deng; Binghe Ma; Weizheng Yuan20122012, vol.18, no.3
Determination of residual stress in deep submicron thick films by the critical buckling technique of annular thin platesDa-Yong Qiao; Xiao-Pei Zheng20122012, vol.18, no.3
Design and characterization of an integrated multifunction micro sensorYulong Zhao; Weizhong Wang; Bian Tian; Libo Zhao; Zhuangde Jiang20122012, vol.18, no.3
Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drivesXiao-Ying Li; Qian Jin; Da-Yong Qiao; Bao-Peng Kang; Bin Yan; Yao-Bo Liu20122012, vol.18, no.3
Flip chip solder bump inspection using vibration analysisJunchao Liu; Tielin Shi; Qi Xia; Guanglan Liao20122012, vol.18, no.3
Disposable microfluidic chip for rapid pathogen identification with DNA microarraysJohannes R. Peham; Lisa-Maria Recnik; Walter Grienauer; Michael J. Vellekoop; Christa Nohammer; Herbert Wiesinger-Mayr20122012, vol.18, no.3
Determination of residual stresses in a single crystalline 3C-SiC micro-fabricated structure using FE model and measured resonance frequenciesMusaab Hassan20122012, vol.18, no.3
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