哈尔滨工业大学邓宗全院士团队
      文献服务与管理平台

期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2012, vol.18, no.1 2012, vol.18, no.11 2012, vol.18, no.12 2012, vol.18, no.2 2012, vol.18, no.3 2012, vol.18, no.4
2012, vol.18, no.5 2012, vol.18, no.6 2012, vol.18, no.7/8 2012, vol.18, no.9/10

题名作者出版年年卷期
Artificial intelligence based optimization for vibration energy harvesting applicationsZdenek Hadas; Jiri Kurfurst; Cestmir Ondrusek; Vladislav Singule20122012, vol.18, no.7/8
New method for selectivity enhancement of SiC field effect gas sensors for quantification of NO_xChristian Bur; Peter Reimann; Mike Andersson; Anita Lloyd Spetz; Andreas Schutze20122012, vol.18, no.7/8
Studies on SiC, DLC and TiO_2 thin films as piezoresistive sensor materials for high temperature applicationM. A. Fraga; H. Furlan; R. S. Pessoa; L. A. Rasia; C. F. R. Mateus20122012, vol.18, no.7/8
Modeling the performance of a micromachined piezoelectric energy harvesterAli B. Alamin Dow; M. Schneider; David Koo; Hasan A. Al-Rubaye; A. Bittner; U. Schmid; Nazir Kherani20122012, vol.18, no.7/8
Sensing viscosity and density of glycerol-water mixtures utilizing a suspended plate MEMS resonatorSamir Cerimovic; Roman Beigelbeck; Hannes Antlinger; Johannes Schalko; Bernhard Jakoby; Franz Keplinger20122012, vol.18, no.7/8
Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applicationsD. Vasilache; S. Colpo; F. Giacomozzi; S. Ronchin; S. Gennaro; A. Q. A. Qureshi; B. Margesin20122012, vol.18, no.7/8
CMOS: compatible wafer bonding for MEMS and wafer-level 3D integrationViorel Dragoi; Eric Pabo; Jurgen Burggraf; Gerald Mittendorfer20122012, vol.18, no.7/8
MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000℃Natsuki Miyakawa; Wolfgang Legner; Thomas Ziemann; Dimitri Telitschkin; Hans-Jorg Fecht; Alois Friedberger20122012, vol.18, no.7/8
Resonantly excited AlN-based microcantilevers for immunosensingM. J. Oliver; J. Hernando-Garcia; A. Ababneh; H. Seidel; U. Schmid; J. P. Andres; P. Pobedinskas; K. Haenen; J. L. Sanchez-Rojas20122012, vol.18, no.7/8
Micromechanical force sensors based on SU-8 resistA. Jordan; S. Buttgenbach20122012, vol.18, no.7/8
12345



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024