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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
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2015, vol.21, no.1
2015, vol.21, no.10
2015, vol.21, no.11
2015, vol.21, no.12
2015, vol.21, no.2
2015, vol.21, no.3
2015, vol.21, no.4
2015, vol.21, no.5
2015, vol.21, no.6
2015, vol.21, no.7
2015, vol.21, no.8
2015, vol.21, no.9
题名
作者
出版年
年卷期
A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 degrees C
Marsi, Noraini; Majlis, Burhanuddin Yeop; Hamzah, Azrul Azlan; Mohd-Yasin, Faisal
2015
2015, vol.21, no.1
Design and characterization of miniature fluid dynamic bearing using novel multi-step elliptical grooves
Chen, Chien-Yu; Liu, Chien-Sheng; Li, Yu-Cheng
2015
2015, vol.21, no.1
Recent progress in low temperature nanoimprint lithography
Sun, Hongwen
2015
2015, vol.21, no.1
Experimental study of a low-g micromachined electrostatically suspended accelerometer for space applications
Ma, G. Y.; Han, F. T.; You, P. C.; Zhang, L.; Yan, X. J.
2015
2015, vol.21, no.1
Development of a simple and reliable PDMS interconnect for high throughput microfluidic applications
Zhang, Z. Y.; Mu, C. J.; Lin, M.; Cao, X. C.
2015
2015, vol.21, no.1
High temperature characteristic for wireless pressure LTCC-based sensor
Tan Qiulin; Kang Hao; Qin Li; Xiong Jijun; Liu Jun; Xue Chenyang; Zhang Wendong; Luo Tao
2015
2015, vol.21, no.1
Application of vertically aligned carbon nanotubes on burnishing slider in cleaning process of magnetic disk surfaces
Tani, Hiroshi; Konishi, Keisuke; Norimatsu, Wataru; Kusunoki, Michiko; Tagawa, Norio
2015
2015, vol.21, no.1
A near zero skew actuation mechanism for hard disk drives
He, Zhimin; Mou, Jianqiang; Chan, Kheong Sann; Lam, Suet Hoi; Lin, Wuzhong
2015
2015, vol.21, no.1
Optimal design of piezoelectric micromachined modal gyroscope (PMMG) with modes matched: modal analysis
Wu, Xiaosheng; Chen, Wenyuan; Reza, Abdolvand
2015
2015, vol.21, no.1
Integration method of silicon sensors on SU-8-based microfluidic platforms
Perdigones, Francisco; Aracil, Carmen; Quero, Jose M.; Gutierrez, Manuel; Jimenez, Cecilia; Gimenez, Pablo
2015
2015, vol.21, no.1
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