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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
1999
2000
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2015
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2018
2019
2020
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2024
2015, vol.21, no.1
2015, vol.21, no.10
2015, vol.21, no.11
2015, vol.21, no.12
2015, vol.21, no.2
2015, vol.21, no.3
2015, vol.21, no.4
2015, vol.21, no.5
2015, vol.21, no.6
2015, vol.21, no.7
2015, vol.21, no.8
2015, vol.21, no.9
题名
作者
出版年
年卷期
Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam
Zhang, Yin; Zhao, Ya-Pu
2015
2015, vol.21, no.4
An integrated, cellulose membrane-based PCR chamber
Qiu, Xianbo; Mauk, Michael G.
2015
2015, vol.21, no.4
Cantilever-type microheater fabricated with thick silicon
Zhao, Xiaohu; Cheng, Tingting; Ma, Hongyu; Wang, Wenjuan; Ding, Enjie
2015
2015, vol.21, no.4
Quality factor measurement for MEMS resonator using time-domain amplitude decaying method
Wang, Yuzhao; Xie, Yong; Zhang, Tianlei; Wu, Guoqiang; Wang, Gang; Yu, Caijia
2015
2015, vol.21, no.4
Coriolis force for facilitating DNA molecular migration and hybridization in compact disk microfluidic platforms
Kassegne, Sam; Khosla, Ajit; Patel, Dhruv; Paramesh, Nithesh; Harwood, Nitin; Arya, Bhuvnesh
2015
2015, vol.21, no.4
The effect of temporary bonding on post processing in TSV interposer manufacturing
Wang, Qibing; Yu, Daquan; Jiang, Feng; Liu, Haiyan; Jing, Xiangmeng
2015
2015, vol.21, no.4
Effects of thermally induced packaging stress on a distributed RF MEMS phase shifter
Zhao, Cheng; Song, Jing; Han, Lei; Huang, Qing-An
2015
2015, vol.21, no.4
Can a curved beam bistable mechanism have a secondary equilibrium that is more stable than its stress-free configuration?
Salinas, Gal; Givli, Sefi
2015
2015, vol.21, no.4
Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement
Zhu, Pengfei; Ma, Binghe; Jiang, Chengyu; Deng, Jinjun; Wang, Yunlong
2015
2015, vol.21, no.4
Simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric thickness ratio
Sunithamani, S.; Lakshmi, P.
2015
2015, vol.21, no.4
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