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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
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2024
2018, vol.24, no.1
2018, vol.24, no.10
2018, vol.24, no.11
2018, vol.24, no.12
2018, vol.24, no.2
2018, vol.24, no.3
2018, vol.24, no.4
2018, vol.24, no.5
2018, vol.24, no.6
2018, vol.24, no.7
2018, vol.24, no.8
2018, vol.24, no.9
题名
作者
出版年
年卷期
Efficient thermal utilization in MEMS bulk micromachined pyroelectric infrared sensor using thermal oxide thin layer
Gaur, Surender P.; Kumar, Prem; Rangra, Kamaljit; Kumar, Dinesh
2018
2018, vol.24, no.3
Two-DOF actuator module design and development based on fully decoupled parallel structure
Ihn, Yong Seok
2018
2018, vol.24, no.3
Robust design of a shape memory actuator with slider and slot layout and passive cooling control
Borboni, Alberto; Faglia, Rodolfo
2018
2018, vol.24, no.3
Electrostatic fringing-fields effects on the structural behavior of MEMS shallow arches
Ouakad, Hassen M.
2018
2018, vol.24, no.3
Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids
Toledo, J.; Ruiz-Diez, V.; Pfusterschmied, G.; Schmid, U.; Sanchez-Rojas, J. L.
2018
2018, vol.24, no.3
Mixing performance of split-and-recombine micromixer with offset inlets
Husain, Afzal; Khan, F. A.; Huda, Noorul; Ansari, M. A.
2018
2018, vol.24, no.3
Analytical study of coupling element effect on anchor-limited quality factor in double beam array based sensing devices
Wang, Dong F.; Zheng, Guowen; Du, Xu; Chang, Jianguo; Wang, Xin
2018
2018, vol.24, no.3
Design and simulations of a resonant accelerometer
Li, Yan; Guo Zhan-She; Qu, Yuanyuan; Zhang, Yunjiu
2018
2018, vol.24, no.3
Numerical simulation and experimental analysis of the sintered micro-parts using the powder injection molding process
Sahli, M.; Djoudi, H.; Gelin, J. -C.; Barriere, T.; Assoul, M.
2018
2018, vol.24, no.3
Size-dependent hygro-thermo-electro-mechanical vibration analysis of functionally graded piezoelectric nanobeams resting on Winkler-Pasternak foundation undergoing preload and magnetic field
Shaghaghi, Gholam Reza; Boreiry, Mahya; Marzbanrad, Javad
2018
2018, vol.24, no.3
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