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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2000, vol.6, no.3 2000, vol.6, no.4 2000, vol.6, no.5 2000, vol.6, no.6

题名作者出版年年卷期
ANKA -- a synchrotron light source for X-ray based micromachiningJ. Gottert; H. O. Moser; F. J. Pantenburg; V. Saile; R. Steininger20002000, vol.6, no.3
Development of new position sensitive electron multiplication device fabricated by LIGA processM. Inoue; D. Fukuda; H. Takahashi; M. Nakazawa; J. Kawarabayashi; Y. Hirata; T. Numazawa; T. Haga20002000, vol.6, no.3
Direct, high throughput LIGA for commercial applications: a progress reportH. Guckel; K. Fischer; E. Stiers; B. Chaudhuri; S. McNamara; M. Ramotowski; E. D. Johnson; C. Kirk20002000, vol.6, no.3
Fabrication of HARM structures by deep-X-ray lithography using graphite mask technologyP. Coane; R. Giasolli; S. Ledger; K. Lian; Z. Ling; J. Gottert20002000, vol.6, no.3
High aspect ratio silicon trench fabrication by inductively coupled plasmaC. K. Chung; H. C. Lu; T. H. Jaw20002000, vol.6, no.3
Improvement of sidewall roughness in deep silicon etchingM. Chabloz; Y. Sakai; T. Matsuura; K. Tsutsumi20002000, vol.6, no.3
Large area, cost effective X-ray masks for high energy photonsK. Fischer; B. Chaudhuri; E. Stiers; H. Guckel20002000, vol.6, no.3
Manufacturing technologies for miniaturized interference filtersM. Frank; N. Kaiser20002000, vol.6, no.3
Proton micromachining: a new technique for the production of three-dimensional microstructuresJ. A. van Kan; J. L. Sanchez; T. Osipowicz; F. Watt20002000, vol.6, no.3
The influence of mask substrate thickness on exposure and development times for the LIGA processS. K. Griffiths; A. Ting; J. M. Hruby20002000, vol.6, no.3
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