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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2000, vol.6, no.3 2000, vol.6, no.4 2000, vol.6, no.5 2000, vol.6, no.6

题名作者出版年年卷期
Alternative resist adhesion and electroplating layers for LIGA processA. El-Kholi; K. Bade; J. Mohr; F. J. Pantenburg; X. -M. Tang20002000, vol.6, no.5
Chemically inert membrane separator fabricated with the AMANDA-processZ. Rummler; W. Bacher; V. Saile; W. K. Schomburg20002000, vol.6, no.5
Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probeM. Yamamoto; H. Takeuchi; S. Aoki20002000, vol.6, no.5
Fabrication of microstructure using fluorinated polyimide and silicone-based positive photoresistT. Ito; R. Sawada; E. Higurashi; T. Kiyokura20002000, vol.6, no.5
High aspect ratio micromachining (HARM) technologies for microinertial devicesM. McNie; D. King; C. Vizard; A. Holmes; K. W. Lee20002000, vol.6, no.5
High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDMK. Takahata; N. Shibaike; H. Guckel20002000, vol.6, no.5
Metal oxide gas sensor for high temperature applicationT. Gessner; K. Gottfried; R. Hoffmann; C. Kaufmann; U. Weiss; E. Charetdinov; P. Hauptmann; R. Lucklum; B. Zimmermann; U. Dietel; G. Springer; M. Vogel20002000, vol.6, no.5
Net shape ceramic microcomponents by modified sol-gel castingC. M. Chan; G. Z. Cao; T. G. Stoebe20002000, vol.6, no.5
Why CMOS-integrated transducers? a reviewA. Witvrouw; F. Van Steenkiste; D. Maes; L. Haspeslagh; P. Van Gerwen; P. De Moor; S. Sedky; C. Van Hoof; A. C. De Vries; A. Verbist; A. De Caussemaeker; B. Parmentier; K. Baert20002000, vol.6, no.5



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