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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2000, vol.6, no.3 2000, vol.6, no.4 2000, vol.6, no.5 2000, vol.6, no.6

题名作者出版年年卷期
A micro cycloid-gear system fabricated by multi-exposure LIGA techniqueS. J. Chung; H. Hein; T. Hirata; J. Mohr; T. Akashi20002000, vol.6, no.4
A new control method for the relative dielectric constant of 1-3 piezoelectric composites realized with the LIGA processT. Numazawa; Y. Hirata; H. Takada20002000, vol.6, no.4
A new sacrificial layer method of LIGA technology to fabricate movable part of a gripperF. Yi; E. Tang; J. Zhang; D. Xian20002000, vol.6, no.4
Adhesion of Ni-structures on Al{sub}2O{sub}3 ceramic substrates used for the sacrificial layer techniqueTh. Kunz; J. Mohr; A. Ruzzu; K. D. Skrobanek; U. Wallrabe20002000, vol.6, no.4
Cost estimation for LIGA fabrication flows using process design methodsK. Hahn; R. Bruck; A. Priebe; C. Schneider20002000, vol.6, no.4
Deep ion projection lithography in PMMA: substrate heating and ion energy concernsM. Lindeberg; J. Buckley; G. Possnert; K. Hjort20002000, vol.6, no.4
Development of microconnector with an automatic connecting/disconnecting mechanismT. Haga; H. Okuyama; H. Takada20002000, vol.6, no.4
Etching through silicon wafer in inductively coupled plasmaS. Franssila; J. Kiihamaki; J. Karttunen20002000, vol.6, no.4
Superplastic extrusion of microgear shaft of 10 μm in moduleY. Saotome; H. Iwazaki20002000, vol.6, no.4



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