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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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2007, vol.13, no.1 2007, vol.13, no.11-12 2007, vol.13, no.2 2007, vol.13, no.3-4 2007, vol.13, no.5-6 2007, vol.13, no.7
2007, vol.13, no.8-10

题名作者出版年年卷期
Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithographySommawan Khumpuang; Mitsuhiro Horade; Kazuya Fujioka; Susumu Sugiyama20072007, vol.13, no.3-4
Mask design compensation for sloped sidewall structures fabricated by X-ray lithographyMitsuhiro Horade; Sommawan Khumpuang; Kazuya Fujioka; Susumu Sugiyama20072007, vol.13, no.3-4
Fabrication of high aspect ratio nano gratings using SR lithographyFumiki Kato; Shinya Fujinawa; Yigui Li; Susumu Sugiyama20072007, vol.13, no.3-4
Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography maskYigui Li; Susumu Sugiyama20072007, vol.13, no.3-4
High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnectorKabseog Kim; Jeong-Bong Lee20072007, vol.13, no.3-4
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement materialHong Lu; Brandon Pillans; Jong-Chang Lee; Jeong-Bong Lee20072007, vol.13, no.3-4
SU-8 3D microoptic components fabricated by inclined UV lithography in waterZ. Ling; K. Lian20072007, vol.13, no.3-4
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layerZ. Ling; K. Lian20072007, vol.13, no.3-4
Processing-microstructure-resulting materials properties of LIGA NiK. Lian; J. C. Jiang; Z. G. Ling20072007, vol.13, no.3-4
Method for polymer hot embossing process developmentProyag Datta; Jost Goettert20072007, vol.13, no.3-4
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