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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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2022 2023

2007, vol.13, no.1 2007, vol.13, no.11-12 2007, vol.13, no.2 2007, vol.13, no.3-4 2007, vol.13, no.5-6 2007, vol.13, no.7
2007, vol.13, no.8-10

题名作者出版年年卷期
Analysis of the demolding forces during hot embossingYuhua Guo; Gang Liu; Xuelin Zhu; Yangchao Tian20072007, vol.13, no.5-6
Large area and wide dimensions X-ray lithography using energy variable synchrotron radiationYuichi Utsumi; Takefumi Kishimoto; Tadashi Hattori; Hirotsugu Hara20072007, vol.13, no.5-6
Planar microreactor for biochemical application made from silicon and polymer filmsYuichi Utsumi; Yusuke Hitaka; Katsuhiro Matsui; Masahiro Takeo; Seiji Negoro; Yoshiaki Ukita20072007, vol.13, no.5-6
Proton beam writing: a tool for high-aspect ratio mask productionJ. A. van Kan; P. G. Shao; K. Ansari; A. A. Bettiol; T. Osipowicz; F. Watt20072007, vol.13, no.5-6
Fluid filter fabricated by deep X-ray lithography for micro fluidicsYoshiaki Ukita; Toshifumi Asano; Yuichi Utsumi20072007, vol.13, no.5-6
Fabrication of a micro reactor for vertical unit operation using multifunctional fluid filter and its application to biochemical reactionToshifumi Asano; Yoshiaki Ukita; Katsuhiro Matsui; Masahiro Takeo; Seiji Negoro; Yuichi Utsumi20072007, vol.13, no.5-6
Deep microstructuring in glass for microfluidic applicationsChantal Khan Malek; Laurent Robert; Jean-Jacques Boy; Pascal Blind20072007, vol.13, no.5-6
Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technologyS. C. Chen; C. H. Cheng; Y. C. Lin20072007, vol.13, no.5-6
Parameter optimization for an ICP deep silicon etching systemS. C. Chen; Y. C. Lin; J. C. Wu; L. Horng; C. H. Cheng20072007, vol.13, no.5-6
Revisiting micro hot-embossing with moulds in non-conventional materialsChantal Khan Malek; Jean-Rene Coudevylle; Jean-Claude Jeannot; Roland Duffait20072007, vol.13, no.5-6
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