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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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2007, vol.13, no.1 2007, vol.13, no.11-12 2007, vol.13, no.2 2007, vol.13, no.3-4 2007, vol.13, no.5-6 2007, vol.13, no.7
2007, vol.13, no.8-10

题名作者出版年年卷期
Theoretical and experimental investigation on electrochemical micromachiningZhaoyang Zhang; Di Zhu; Ningsong Qu; Minghuan Wang20072007, vol.13, no.7
System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representationYongquan Wang; Hualing Chen; Xueming He20072007, vol.13, no.7
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibrationC. Feng; Ya-Pu Zhao; D. Q. Liu20072007, vol.13, no.7
Mathematical analysis and test of an electrostatically actuated micro-power relayS. J. Jeong; D. E. Lee; W. Wang20072007, vol.13, no.7
Head-disk spacing measurement based on Michelson interferometry using white light illuminationY. He; H. Zhang; Y. Mitsuya; K. Fukuzawa20072007, vol.13, no.7
A new technology for microfluidic structures preparation based on a photoimageable ceramicIwona Wyzkiewicz; Natalia Lewandowska; Michal Chudy; Zbigniew Brzozka; Zbigniew Magonski; Barbara Dziurdzia; Malgorzata Jakubowska; Artur Dybko20072007, vol.13, no.7
Shape optimization and dynamic characterization of multiple-electrostatically deformable microbridgesYunqiang Li; Packirisamy Muthukumaran; Rama B. Bhat20072007, vol.13, no.7
Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumpsA. T. Al-Halhouli; M. I. Kilani; A. Al-Salaymeh; S. Buttgenbach20072007, vol.13, no.7
Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental resultsThomas G. Hayes; Bharat Bhushan20072007, vol.13, no.7
3D-feature-based structure design for silicon fabrication of micro devicesYang Liu; Pingyu Jiang; Dinghong Zhang; Guanghui Zhou20072007, vol.13, no.7
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