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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2013, vol.19, no.1 2013, vol.19, no.11 2013, vol.19, no.12 2013, vol.19, no.2 2013, vol.19, no.3 2013, vol.19, no.4
2013, vol.19, no.5 2013, vol.19, no.6 2013, vol.19, no.7 2013, vol.19, no.8 2013, vol.19, no.9/10

题名作者出版年年卷期
Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGAHideki Kido; Tomoyuki Kuroki; Masaaki Okubo; Yuichi Utsumi20132013, vol.19, no.3
Fabrication of high precision microstructure using ICP etching for capacitive inclination sensorDaiji Noda; Yuu Kuboyama; Tadashi Hattori20132013, vol.19, no.3
Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologiesHarutaka Mekaru; Chieko Okuyama; Akihisa Ueno20132013, vol.19, no.3
Effect of buffer materials on thermal imprint on plastic optical fiberHarutaka Mekaru; Akihiro Ohtomo; Hideki Takagi20132013, vol.19, no.3
3D deep X-ray lithography for producing a multi-channel Fourier transform interferometerSascha P. Heussler; Herbert O. Moser; S. M. P. Kalaiselvi20132013, vol.19, no.3
Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insertJong Hyun Kim; Si-Young Choi; Jae-Ho Jeon; Geunbae Lim; Suk Sang Chang20132013, vol.19, no.3
Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure timeMitsuhiro Horade; Susumu Sugiyama20132013, vol.19, no.3
Influence of developer temperature on the shape of structures fabricated by deep X-ray lithographyMitsuhiro Horade; Susumu Sugiyama20132013, vol.19, no.3
Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tipDae Keun Choi; Sang Hoon Lee20132013, vol.19, no.3
Obstacles for cognitive analogy in analysis and synthesis in microsystems developmentAlbert Albers; Peter Borsting; Sven Matthiesen20132013, vol.19, no.3
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