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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2016, vol.22, no.1 2016, vol.22, no.10 2016, vol.22, no.11 2016, vol.22, no.12 2016, vol.22, no.2 2016, vol.22, no.3
2016, vol.22, no.4 2016, vol.22, no.5 2016, vol.22, no.6 2016, vol.22, no.7 2016, vol.22, no.8 2016, vol.22, no.9

题名作者出版年年卷期
FBAR-on-diaphragm type electro-acoustic resonant micro-accelerometer: a theoretical studyGao, Yang; He, Wan-jing; Li, Jun-ru; Huang, Zhen-hua20162016, vol.22, no.7
Special Issue of the Conferences 'Smart Sensors, Actuators and MEMS', 'Cyber-Physical Systems' and 'Bio-MEMS and Medical Microdevices' within the SPIE EUROPE 'MICROTECHNOLOGIES' Symposium Barcelona, Spain, 4-6 May 2015Schmid, Ulrich; Luis Sanchez-Rojas, Jose; van den Driesche, Sander; Brama, Riccardo; Michel, Bernd20162016, vol.22, no.7
Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design conceptIannacci, J.; Sordo, G.20162016, vol.22, no.7
Transforming car glass into microphones using piezoelectric transducersBolzmacher, Christian; Le Guelvouit, Valentin20162016, vol.22, no.7
Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMSHofmann, Lutz; Werner, Thomas; Selbmann, Franz; Rennau, Michael; Ecke, Ramona; Schulz, Stefan E.; Gessner, Thomas; Fischer, Tobias20162016, vol.22, no.7
Properties of ScxAl1-xN (x=0.27) thin films on sapphire and silicon substrates upon high temperature loadingPersson, P. O. A.; Bittner, A.; Schmid, U.; Mayrhofer, P. M.20162016, vol.22, no.7
Impact of the substrate dependent polarity distribution in c-axis oriented AlN thin films on the etching behaviour and the piezoelectric propertiesWistrela, E.; Schneider, M.; Bittner, A.; Schmid, U.20162016, vol.22, no.7
In-liquid characterization of in-plane and high order out-of-plane modes of AlN-based square microplatesRuiz-Diez, V.; Hernando-Garcia, J.; Ababneh, A.; Seidel, H.; Sanchez-Rojas, J. L.20162016, vol.22, no.7
The charge push-through electronics design for fully implantable artificial cochlea powered by energy harvesting technologiesZak, Jaromir; Hadas, Zdenek; Dusek, Daniel; Pekarek, Jan; Svatos, Vojtech; Janak, Ludek; Prasek, Jan; Hubalek, Jaromir20162016, vol.22, no.7
Path of microparticles in a microfluidic device employing dielectrophoresis for hyperlayer field-flow fractionationAlazzam, Anas; Khashan, Saud; El-Khasawneh, Bashar; Mathew, Bobby20162016, vol.22, no.7
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