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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2014, vol.20, no.1
2014, vol.20, no.10/11
2014, vol.20, no.12
2014, vol.20, no.2
2014, vol.20, no.3
2014, vol.20, no.4/5
2014, vol.20, no.6
2014, vol.20, no.7
2014, vol.20, no.8/9
题名
作者
出版年
年卷期
Design and fabrication of 3-dimensional helical structures in polydimethylsiloxane for flow control applications
Rajeev Kumar Singh; Avinash Kumar; Rishi Kant; Ankur Gupta; E. Suresh; Shantanu Bhattacharya
2014
2014, vol.20, no.1
Vertically aligned multi-walled CNT arrays coated by gold nanoparticles for surface-enhanced Raman scattering
Jie Zhang; Yulin Chen; Tuo Fan; Chunhong Lai; Yong Zhu
2014
2014, vol.20, no.1
A rotary comb-actuated microgripper with a large displacement range
Honglong Chang; Haitao Zhao; Fang Ye; Guangmin Yuan; Jianbing Xie; Michael Kraft; Weizheng Yuan
2014
2014, vol.20, no.1
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
Pongsak Kerdlapee; Anurat Wisitsoraat; Ditsayuth Phokaratkul; Komgrit Leksakul; Rungreung Phatthanakun; Adisorn Tuantranont
2014
2014, vol.20, no.1
Design and fabrication of a micromachined gyroscope with high shock resistance
Jian Zhou; Tao Jiang; Ji-wei Jiao; Ming Wu
2014
2014, vol.20, no.1
CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMS
Ananiah Durai Sundararajan; S. M. Rezaul Hasan
2014
2014, vol.20, no.1
Theoretical and numerical investigations of an electroosmotic flow micropump with interdigitated electrodes
Ujjal Barman; Ashis K. Sen; Subhash C. Mishra
2014
2014, vol.20, no.1
Galvanic deposition in partially conductive plastic molds for manufacture of finely detailed microcomponents
Volker Piotter; Jurgen Prokop
2014
2014, vol.20, no.1
Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensor
M. T. Bensidhoum; M. Laghrouche; A. Sidi Said; L. Montes; J. Boussey
2014
2014, vol.20, no.1
Electro-thermal analysis of an embedded boron diffused microheater for thruster applications
Pijus Kundu; Tarun Kanti Bhattacharyya; Soumen Das
2014
2014, vol.20, no.1
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