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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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2004 2005 2006 2007 2008 2009
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2016 2017 2018 2019 2020 2021
2022 2023

2014, vol.20, no.1 2014, vol.20, no.10/11 2014, vol.20, no.12 2014, vol.20, no.2 2014, vol.20, no.3 2014, vol.20, no.4/5
2014, vol.20, no.6 2014, vol.20, no.7 2014, vol.20, no.8/9

题名作者出版年年卷期
Design and fabrication of 3-dimensional helical structures in polydimethylsiloxane for flow control applicationsRajeev Kumar Singh; Avinash Kumar; Rishi Kant; Ankur Gupta; E. Suresh; Shantanu Bhattacharya20142014, vol.20, no.1
Vertically aligned multi-walled CNT arrays coated by gold nanoparticles for surface-enhanced Raman scatteringJie Zhang; Yulin Chen; Tuo Fan; Chunhong Lai; Yong Zhu20142014, vol.20, no.1
A rotary comb-actuated microgripper with a large displacement rangeHonglong Chang; Haitao Zhao; Fang Ye; Guangmin Yuan; Jianbing Xie; Michael Kraft; Weizheng Yuan20142014, vol.20, no.1
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB processPongsak Kerdlapee; Anurat Wisitsoraat; Ditsayuth Phokaratkul; Komgrit Leksakul; Rungreung Phatthanakun; Adisorn Tuantranont20142014, vol.20, no.1
Design and fabrication of a micromachined gyroscope with high shock resistanceJian Zhou; Tao Jiang; Ji-wei Jiao; Ming Wu20142014, vol.20, no.1
CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMSAnaniah Durai Sundararajan; S. M. Rezaul Hasan20142014, vol.20, no.1
Theoretical and numerical investigations of an electroosmotic flow micropump with interdigitated electrodesUjjal Barman; Ashis K. Sen; Subhash C. Mishra20142014, vol.20, no.1
Galvanic deposition in partially conductive plastic molds for manufacture of finely detailed microcomponentsVolker Piotter; Jurgen Prokop20142014, vol.20, no.1
Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensorM. T. Bensidhoum; M. Laghrouche; A. Sidi Said; L. Montes; J. Boussey20142014, vol.20, no.1
Electro-thermal analysis of an embedded boron diffused microheater for thruster applicationsPijus Kundu; Tarun Kanti Bhattacharyya; Soumen Das20142014, vol.20, no.1
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