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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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2022 2023

2014, vol.20, no.1 2014, vol.20, no.10/11 2014, vol.20, no.12 2014, vol.20, no.2 2014, vol.20, no.3 2014, vol.20, no.4/5
2014, vol.20, no.6 2014, vol.20, no.7 2014, vol.20, no.8/9

题名作者出版年年卷期
Design and control of a single-stage dual-actuator system for high-precision manufacturingMichael D. Kim; Kwang-Hee Lee; Kyung-Tae Nam; Sang-Moo Lee20142014, vol.20, no.2
Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscopeYongsong He; Xiaosheng Wu; Fu Zheng; Wenyuan Chen; Weiping Zhang; Feng Cui; Wu Liu20142014, vol.20, no.2
Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machinesDonghui Chu; Akihiro Nemoto; Hiroshi Ito20142014, vol.20, no.2
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysisLiang He; Masaya Toda; Yusuke Kawai; Hidetoshi Miyashita; Mamoru Omori; Toshiyuki Hashida; Rudiger Berger; Takahito Ono20142014, vol.20, no.2
Chemiluminescence detection for Cu (II) based on 1,10-Phenanthroline-hydrogen peroxide reaction on a PDMS microfluidic chipXueye Chen; Hong Zeng; Xing Wei; Jincheng Yang20142014, vol.20, no.2
A study on effect of wafer bow in wafer-level BCB cap transfer packagingSeonho Seok; Janggil Kim20142014, vol.20, no.2
Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additivesKrzysztof P. Rola; Konrad Ptasinski; Adrian Zakrzewski; Irena Zubel20142014, vol.20, no.2
Transition interface for improving the temperature characteristics of micromachined gyroscopesZhanqiang Hou; Xuezhong Wu; Dingbang Xiao; Zhihua Chen; Jianbin Su20142014, vol.20, no.2
Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuatorsMohamed Sultan Mohamed Ali; Wang Ning Yuan; Kenichi Takahata20142014, vol.20, no.2
An experimental investigation of mixing of carbon nanotube/polymer composite in a batch-type screw mixerKyoung Duck Seo; Jang Min Park; Hyeonsoo Jeong; Dong Sung Kim20142014, vol.20, no.2
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