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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2014, vol.20, no.1
2014, vol.20, no.10/11
2014, vol.20, no.12
2014, vol.20, no.2
2014, vol.20, no.3
2014, vol.20, no.4/5
2014, vol.20, no.6
2014, vol.20, no.7
2014, vol.20, no.8/9
题名
作者
出版年
年卷期
A comprehensive study on RF MEMS switch
H. Jaafar; K. S. Beh; N. A. M. Yunus; W. Z. W. Hasan; S. Shafie; O. Sidek
2014
2014, vol.20, no.12
Underwater artificial lateral line flow sensors
Tan Shizhe
2014
2014, vol.20, no.12
Micro rate gyros for highly dynamic objects
Dmitry Lukyanov; Sergey Shevchenko; Alexander Kukaev
2014
2014, vol.20, no.12
Study on frequency stability of a linear-vibration MEMS gyroscope
Wei Wang; Tingkai Zhang; Dongqing Fan; Chaoyang Xing
2014
2014, vol.20, no.12
Fabrication of various nano-structured nickel stamps using anodic aluminum oxide
Jang Min Park
2014
2014, vol.20, no.12
PZT length optimization of MEMS piezoelectric energy harvester with a non-traditional cross section: simulation study
S. Sunithamani; P. Lakshmi; E. Eba Flora
2014
2014, vol.20, no.12
Dual-axis tuning fork vibratory gyroscope with anti-phase mode vibration mechanism
Sheng-Ren Chiu; Chung-Yang Sue; Chih-Hsiou Lin; Yan-Kuin Su
2014
2014, vol.20, no.12
A novel method to overcome photoresist collapse with high aspect ratio structures
Mingyan Yu; Shirui Zhao; Chaoqun Gao; Xiaolong Guo; Xinwei Xu; Yunbo Shi; Yupeng Jing; Baoqin Chen
2014
2014, vol.20, no.12
A novel electrostatic based microgripper (cellgripper) integrated with contact sensor and equipped with vibrating system to release particles actively
Hamed Demaghsi; Hadi Mirzajani; Habib Badri Ghavifekr
2014
2014, vol.20, no.12
Patterning of burnishing head for hard disk platters by synchrotron radiation lithography
Komgrit Leksakul; Chalinee Maneekat; Rungrueang Phatthanakun
2014
2014, vol.20, no.12
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