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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
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2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2014, vol.20, no.1
2014, vol.20, no.10/11
2014, vol.20, no.12
2014, vol.20, no.2
2014, vol.20, no.3
2014, vol.20, no.4/5
2014, vol.20, no.6
2014, vol.20, no.7
2014, vol.20, no.8/9
题名
作者
出版年
年卷期
Design and control of a single-stage dual-actuator system for high-precision manufacturing
Michael D. Kim; Kwang-Hee Lee; Kyung-Tae Nam; Sang-Moo Lee
2014
2014, vol.20, no.2
Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope
Yongsong He; Xiaosheng Wu; Fu Zheng; Wenyuan Chen; Weiping Zhang; Feng Cui; Wu Liu
2014
2014, vol.20, no.2
Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines
Donghui Chu; Akihiro Nemoto; Hiroshi Ito
2014
2014, vol.20, no.2
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
Liang He; Masaya Toda; Yusuke Kawai; Hidetoshi Miyashita; Mamoru Omori; Toshiyuki Hashida; Rudiger Berger; Takahito Ono
2014
2014, vol.20, no.2
Chemiluminescence detection for Cu (II) based on 1,10-Phenanthroline-hydrogen peroxide reaction on a PDMS microfluidic chip
Xueye Chen; Hong Zeng; Xing Wei; Jincheng Yang
2014
2014, vol.20, no.2
A study on effect of wafer bow in wafer-level BCB cap transfer packaging
Seonho Seok; Janggil Kim
2014
2014, vol.20, no.2
Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives
Krzysztof P. Rola; Konrad Ptasinski; Adrian Zakrzewski; Irena Zubel
2014
2014, vol.20, no.2
Transition interface for improving the temperature characteristics of micromachined gyroscopes
Zhanqiang Hou; Xuezhong Wu; Dingbang Xiao; Zhihua Chen; Jianbin Su
2014
2014, vol.20, no.2
Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
Mohamed Sultan Mohamed Ali; Wang Ning Yuan; Kenichi Takahata
2014
2014, vol.20, no.2
An experimental investigation of mixing of carbon nanotube/polymer composite in a batch-type screw mixer
Kyoung Duck Seo; Jang Min Park; Hyeonsoo Jeong; Dong Sung Kim
2014
2014, vol.20, no.2
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