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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2014, vol.20, no.1 2014, vol.20, no.10/11 2014, vol.20, no.12 2014, vol.20, no.2 2014, vol.20, no.3 2014, vol.20, no.4/5
2014, vol.20, no.6 2014, vol.20, no.7 2014, vol.20, no.8/9

题名作者出版年年卷期
Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heaterPeter Meszmer; Karla Hiller; Steffen Hartmann; Alexey Shaporin; Daniel May; Raul David Rodriguez; Jorg Arnold; Gianina Schondelmaier; Jan Mehner; Dietrich R. T. Zahn; Bernhard Wunderle20142014, vol.20, no.6
Detection principles and development of microfluidic sensors in the last decadeRahul Antony; M. S. Giri Nandagopal; Nidhin Sreekumar; N. Selvaraju20142014, vol.20, no.6
Packaging of a 3-axial piezoresistive force sensor with backside contactsT. Karpati; S. Kulinyi; R. Vegvari; J. Ferencz; A. Nagy; A. E. Pap; G. Battistig20142014, vol.20, no.6
Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossingB. Saha; M. Dirckx; D. E. Hardt; S. B. Tor; E. Liu; J. H. Chun20142014, vol.20, no.6
Investigation on the effect of different design of SCR on the change of resistance in piezoresistive micro cantileverKhairul Anuar Abd Wahid; Hing Wah Lee; Mohd Aniq Shazni; Ishak Abd Azid20142014, vol.20, no.6
RF MEMS continuous reversible variable inductor based on a microfluidic networkIssam El Gmati; Pierre Francois Calmon; Ali Boukabache; Patrick Pons; Hatem Boussetta; Mouhamed Adel Kallala; Kamel Besbes20142014, vol.20, no.6
Capillary-based water removal cathode for an air-breathing micro direct methanol fuel cellXiaohong Wang; Yan'an Zhou; Litian Liu20142014, vol.20, no.6
Formation of metal nanostructures by high-temperature imprintingHarutaka Mekaru20142014, vol.20, no.6
Design and fabrication of a valveless micropump based on low temperature co-fired ceramic tape technologyChi-Mo Huang; Yi-Chun Wang20142014, vol.20, no.6
A novel MEMS elastic-based dry electrode for electroencephalography measurementTao Yuan; Di Chen; Jingdong Chen; Xiang Chen; Xiaowei Wang; Baoliang Lu20142014, vol.20, no.6
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