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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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2022 2023

2011, vol.17, no.1 2011, vol.17, no.10/11 2011, vol.17, no.12 2011, vol.17, no.2 2011, vol.17, no.3 2011, vol.17, no.4
2011, vol.17, no.5/7 2011, vol.17, no.8 2011, vol.17, no.9

题名作者出版年年卷期
A MEMS nano-extensometer with integrated de-amplification mechanismA. Ya'akobovitz; S. Krylov; Y. Hanein20112011, vol.17, no.3
An effective method to obtain commutation positions in BLDC drive modeSong Lin; Chao Bi; Quan Jiang20112011, vol.17, no.3
Design and optimization of parylene nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensingQinglong Zheng; Yong Xu20112011, vol.17, no.3
Low cost fabrication of microelectrodes on plastic substrateYan Xu; Long-Biao Huang; Kai-Leung Yung; Yun-Chuan Xie; Thomas Ming-Hung Lee20112011, vol.17, no.3
A three-phased circular electrode array for electro-osmotic microfluidic pumpingKongying Xie; Yongjun Lai; Xin Guo; Rob J. Campbell20112011, vol.17, no.3
Low resistive silicon substrate as an etch-stop layer for drilling thick SiO_2 by spark assisted chemical engraving (SACE)Jayan Ozhikandathil; Andrew Morrison; Muthukumaran Packirisamy; Rolf Wuthrich20112011, vol.17, no.3
Effect of substrate-target distance and sputtering pressure in the synthesis of AlN thin filmsG. F. Iriarte; J. G. Rodriguez; F. Calle20112011, vol.17, no.3
Numerical modeling of a novel degradable drug delivery system with microholesYang Gao; Tianning Chen; Xiaopeng Wang20112011, vol.17, no.3
Planarization of patterned magnetic recording media to enable head flyabilityChulmin Choi; Yeoungchin Yoon; Daehoon Hong; Young Oh; Frank E. Talke; Sungho Jin20112011, vol.17, no.3
A polymer-based bidirectional micropump driven by a PZT bimorphYi Luo; Miao Lu; Tianhong Cui20112011, vol.17, no.3
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