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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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2022 2023

2011, vol.17, no.1 2011, vol.17, no.10/11 2011, vol.17, no.12 2011, vol.17, no.2 2011, vol.17, no.3 2011, vol.17, no.4
2011, vol.17, no.5/7 2011, vol.17, no.8 2011, vol.17, no.9

题名作者出版年年卷期
A parameter identification method for thermal flying-height control slidersGang Sheng; Jianfeng Xu20112011, vol.17, no.9
Review of MEMS flow sensors based on artificial hair cell sensorMohd Norzaidi Mat Nawi; Asrulnizam Abd Manaf; Mohd Rizal Arshad; Othman Sidek20112011, vol.17, no.9
Numerical study of enhancing the mixing effect in microchannels via transverse electroosmotic flow by placing electrodes on top and bottom of the channelHongjun Song; Dawn J. Bennett20112011, vol.17, no.9
Polymeric (SU-8) optical microscanner driven by electrostatic actuationSeung-Hwan Moon; Min-Ho Jun; Jae-Yong An; Jong-Hyun Lee20112011, vol.17, no.9
On the tunability of a MEMS based variable capacitor with a novel structureHamed Mobki; Morteza H. Sadeghi; Saeid Afrang; Ghader Rezazadeh20112011, vol.17, no.9
Design and fabrication of implantable pressure sensing resistor sensor for human bladder monitoring systemJonghyun Kim; Bumkyoo Choi20112011, vol.17, no.9
Device for oxide dots fabrication with copper wire as cathode probeK. Sathiyaraj; K. Kanivalan; P. Venkatesan; K. Rajendran; S. Kumaran20112011, vol.17, no.9
A synchronous microsystem process using a dual-cylinder tool for the surface microstructures from solar cell silicon wafersP. S. Pa20112011, vol.17, no.9
Design and realization of micro structured surfaces for thermodynamic applicationsAndreas Schubert; Matthias Hackert-Oschatzchen; Gunnar Meichsner; Mike Zinecker20112011, vol.17, no.9
An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensationZhangyang Tang; Shangchun Fan; Weiwei Xing; Zhanshe Guo; Zhengyuan Zhang20112011, vol.17, no.9
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